Dec 08 2009
Thermal Coatings in the Semiconductor Industry
At the beginning of production, semiconductor chips are nothing more than vulnerable, raw silicon wafers. Because of this vulnerability and the fact that semiconductor production is a highly corrosive process, specialized thermal coatings are required to act as corrosion resistance for the semiconductor chips as well as for chamber components that house the process.
Semiconductor chips are subject to an etching process that exposes the chips to corrosive gases. Along with the ceramic coatings often used to protect the semiconductors during this process, specialized plasma spray coatings serve as excellent corrosion resistance for metal etch chambers. Different materials require different thermal coatings. Members of the semiconductor industry would do well to find a company that is capable of handling all types of plasma spray and thermal spray coatings.
Proper plasma spray coatings will allow semiconductor equipment components to achieve maximum performance by providing them with superior corrosion resistance, erosion resistance, thermal conductivity and dielectric properties. For example, a quality plasma spray coating will extend the life of metal etch chambers by more than 30 times.
APS Materials, Inc. has been developing new thermal spray solutions for the semiconductor industry for nearly a decade. APS Materials, Inc. has significant experience in applying a variety of coatings to various semiconductor equipment components. Due to the amount of different materials used in the semiconductor industry, custom thermal coatings are often required. Custom coatings are regularly engineered by APS Materials, Inc. to meet the demands of new or unusual applications.
For further information on semiconductor coating solutions, or other uses for plasma spray and thermal spray coatings, please call us directly at 937-278-6547 or visit us at www.apsmaterials.com.
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